PRNCPLS OF DEVICE MICROFABRCTN

Section

Professor

J Yardley

Course Information

Science and technology of conventional and advanced microfabrication techniques for electronics, integrated and discrete components. Topics include diffusion; ion implantation, thin-film growth including oxides and metals, molecular beam and liquid-phase epitaxy; optical and advanced lithography; and plasma and wet etching.

Department: Electrical Engineering(ELEN)

Subject: Electrical Engineering(ELEN)

School: Fu Foundation School of Engineering and Applied Science

Division: School of Engineering and Applied Science: Graduate

Course ID: 4944