PRNCPLS OF DEVICE MICROFABRCTN
Science and technology of conventional and advanced microfabrication techniques for electronics, integrated and discrete components. Topics include diffusion; ion implantation, thin-film growth including oxides and metals, molecular beam and liquid-phase epitaxy; optical and advanced lithography; and plasma and wet etching.
Department: Electrical Engineering(ELEN)
Subject: Electrical Engineering(ELEN)
School: Fu Foundation School of Engineering and Applied Science
Division: School of Engineering and Applied Science: Graduate
Course ID: 4944