Raj
Mutharasan: Semiconductor Processing
The
purpose of this module is to introduce the
transport phenomena topic, diffusion and
transient diffusion, from the example of
manufacture of integrated circuits. The
primary instructional objective is the transport
phenomena topic. The manufacturing processes
provide a means to capture the interest
and attention of the student. The manufacturing
process is not intended to be comprehensive,
but it is presented in sufficient detail
so that the main ideas of manufacturing
are discussed.
[browsable
text]
[pdf format]